All electronica ehibition areas
Micro- and nanosystems
On this page
As the world’s leading electronics trade fair, electronica provides a central platform for companies interested in MEMS technologies and looking to evaluate, compare, or integrate them into new products. It is the place where visitors can meet suppliers, component manufacturers, research institutions, and technology partners in the field of micro- and nanosystems technology.
Microelectromechanical systems (MEMS) combine mechanical microstructures, sensors, actuators, and electronic signal processing in a very small space. They are a key technology in modern electronics because they measure physical quantities such as acceleration, pressure, or sound and make them usable for digital systems. Whether it’s airbag sensors, smartphones, wearables, Industry 4.0, the IoT, or medical technology: MEMS enable compact, energy-efficient, and scalable applications. For developers, it’s not just the individual sensor that matters, but the interplay between the component, packaging, software, calibration, and system integration.
Key Points at a Glance
- MEMS combine micromechanical structures, sensors, actuators, and electronics on a chip or wafer
- MEMS sensors measure quantities such as acceleration, pressure, sound, or environmental parameters
- Key advantages include miniaturization, low power consumption, and a high degree of system integration
- Limitations arise from environmental influences, drift, packaging, calibration, cost, and application-specific accuracy requirements
- electronica brings together MEMS suppliers, researchers, component manufacturers, and system providers
Micro- and nanosystems at electronica
MEMS are tiny components that have a big impact. They enable electronic devices to sense their surroundings and respond to them, and they are leading to products becoming smaller, smarter, and more powerful—from vehicles and smartphones to connected industrial plants.
As the world’s leading electronics trade fair, electronica provides a central platform for companies interested in MEMS technologies and looking to evaluate, compare, or integrate them into new products. It is the place where visitors can meet suppliers, component manufacturers, research institutions, and technology partners in the field of micro- and nanosystems technology. You can compare the latest MEMS products, discuss specific project requirements, and identify suitable partners for development, manufacturing, packaging, and system integration.
What are MEMS, and how do they work?
MEMS stands for microelectromechanical systems. This refers to miniaturized systems that combine electrical and mechanical functions in a very small space.
Many people use MEMS every day without even realizing it: For example, when a smartphone screen rotates automatically, it’s MEMS sensors that detect the device’s movement and acceleration and adjust the screen orientation accordingly. Similar micromechanical sensors and actuators are used in many other applications, ranging from hearing aids and medical sensors to print heads in inkjet printers.
Design and operating principle
A MEMS component typically consists of three functional areas: a micromechanical structure, a sensor or actuator element, and an electronic evaluation unit. Mechanical quantities such as acceleration, pressure, or sound cause a structure to change on the micrometer scale—this change is detected electrically and then processed by integrated circuits.
As such, MEMS combine the mechanical response of a microcomponent with the signal processing capabilities of semiconductor technology. The Fraunhofer IMS describes MEMS as innovative microelectronic and micromechanical systems.
Typical MEMS sensors
| Type | Application | Advantages | Disadvantages |
|---|---|---|---|
Acceleration sensor | Airbags, wearables, motion detection, condition monitoring | Compact, lightweight, energy- and cost-efficient, suitable for series production | Cross-sensitivity, drift, and the need for calibration may occur |
Gyroscope | ESP, navigation, robotics, drones, satellite attitude control | Measures rotational speeds | Temperature-dependent, offset drift possible, highly sensitive |
MEMS microphone | Smartphones, hearables, wearables, voice control, industrial audio, telemetry | Very small, able to be digitally integrated, highly reproducible, robust, durable | Sensitive to moisture, dust, and acoustic design; limited dynamic range |
Pressure sensor | Automotive, industry, medical technology, heating, ventilation, and air conditioning (HVAC) | Precise pressure measurement in a compact design, cost-effective, energy-efficient | Packaging and media compatibility are crucial; limited measurement ranges |
Microfluidics/bio-MEMS | “Lab-on-a-Chip,” “point-of-care” diagnostics, dosing, screening, drug delivery systems | Small sample volumes, high integration, high sensitivity, high efficiency, compact, low risk of contamination | Complex materials, extensive validation and cleaning requirements, surface effects |
Advantages and limitations
MEMS enable compact designs, low power consumption, and high-volume production, and make it possible to integrate sensors directly into electronic systems. Limitations arise from factors such as temperature, vibration, humidity, contact with media, long-term drift, aging, and packaging, among others. For this reason, developers should always evaluate MEMS sensors within the target system, rather than in isolation at the component level.
How are MEMS manufactured?
MEMS are manufactured on silicon wafers, similar to semiconductor chips. Because their structures are only a few micrometers in size, the process utilizes techniques from microtechnology and semiconductor technology. This allows many identical MEMS components to be produced in parallel on a single wafer – with precision, reproducibility, and in large quantities.
Wafer-based manufacturing
Many MEMS are based on a silicon wafer, upon which the sensor or actuator structures are built up layer by layer. Depending on their function, these result in moving masses, membranes, channels, electrodes, or cavities. Silicon is particularly well-suited for this purpose because it is mechanically stable, able to be electrically integrated, and easy to process industrially.
Microstructuring via photolithography
A key step in MEMS production is photolithography. In this process, a machine applies a light-sensitive layer—known as photoresist—to the wafer. The paint is then exposed to light through a mask. The mask determines which areas will be retained and which will be removed.
Etching processes for fine structures
After photolithography, a machine etches the exposed areas. In this process, material is selectively removed to create micromechanical structures through wet-chemical or dry-chemical processes. Depending on the processing, the resulting structures may be more directional and vertical, or they may be more deeply etched.
Deposition of functional layers
In addition to removing material, new layers are also deposited during MEMS production. These are able to perform electrical, thermal, piezoelectric, magnetic, or mechanical functions.
Bonding and cleanroom manufacturing
Many MEMS consist of several layers or wafers that are bonded together. All production steps take place in a cleanroom, since even the smallest particles can impair the functionality of the microstructures.
In which sectors are MEMS used?
Automotive
In vehicles, MEMS measure, among other things, acceleration, rotational rate, and pressure, as well as environmental parameters such as humidity, temperature, and gas concentration. MEMS help to deploy airbags, regulate the Electronic Stability Program (ESP) and engine management, and control driver assistance systems.
Consumer electronics
Devices such as smartphones, smartwatches, headphones, cameras, and augmented/virtual reality (AR/VR) systems use MEMS for motion detection, audio recording, image stabilization, altitude measurement, and control functions. Bosch points out that MEMS sensors are found in about half of all new smartphones, for example.
Industry & IoT
In industry, MEMS enable compact sensor nodes for applications such as condition monitoring, process monitoring, robotics, and predictive maintenance. For IoT applications, factors such as energy efficiency, the degree of integration, and cost per measurement point are particularly crucial.
Medicine & microfluidics
In medical technology, MEMS are used in applications such as pressure sensors, dosing systems, implants, “lab-on-a-chip” systems, and microfluidic analysis platforms. In addition to a very high degree of precision, key requirements here also include high biocompatibility, efficient validation, and high resistance to media.
Which MEMS technology is right for my application?
Choosing the right technology for a given application depends primarily on what physical quantity is being measured and where it will be used. For example, an acceleration sensor measures linear acceleration, a gyroscope measures angular velocity, a pressure sensor measures pressure differences or absolute pressure, and a MEMS microphone measures sound pressure. Complex systems, such as in inertial measurement units, often combine multiple types of sensors.
Key criteria for making a decision are:
- Measurement range
- Resolution
- Precision
- Temperature behavior
- Long-term stability
- Noise
- Energy demand
- Interfaces
- Design
- Costs
- Availability
- Certifications
Some common mistakes made during the selection process include focusing too narrowly on datasheet values, failing to adequately evaluate the packaging, lacking a calibration strategy, and placing the component in an unfavorable location on the circuit board. Developers should therefore always test MEMS within the overall system.
Trends and innovations in MEMS technology
MEMS are increasingly evolving from individual sensor components into highly integrated system components. Future development will focus on smaller designs, lower power consumption, higher measurement accuracy, more robust packaging, and closer integration of sensor technology, electronics, and data processing.
Miniaturization and integration
The increasing level of miniaturization is still a key trend. MEMS are no longer being viewed merely as individual sensors, but as part of an overall system consisting of a chip, a housing, electronics, and software. Processes such as wafer-level and post-CMOS processes, as well as 3D integration, support this development because they combine MEMS structures directly with electronic circuits.
Smart sensors and sensor fusion
Another trend is moving intelligence closer to the sensor, which is usually referred to as “smart sensors” or “sensor fusion.” Modern MEMS don’t just provide raw data; they can also preprocess measurement values, reduce noise, or combine data from multiple sensors. This reduces the volume of data, energy consumption, and system complexity, especially in wearables, IoT sensor nodes, and mobile devices.
New materials.
In addition to silicon, new materials and combinations of materials are becoming increasingly important. These include piezoelectric, biocompatible, flexible, and particularly durable materials, which enable MEMS with new properties, such as those for medical applications, flexible sensors, high-temperature environments, or chemical measurement tasks.
Microfluidics and bio-MEMS
Bio-MEMS and microfluidic systems are a dynamic field of innovation. They make it possible to precisely control minute volumes of liquid and are used in applications such as diagnostics, “lab-on-a-chip” systems, drug dosing, cell analysis, and point-of-care applications.
Market leaders and innovative companies in the MEMS sector at electronica
These trends are particularly relevant for visitors to electronica because MEMS cannot be viewed in isolation. What matters is the interplay between sensors, semiconductor technology, packaging, printed circuit board design, software, testing, calibration, and system integration.
The leading companies in the MEMS market include:
- Bosch Group
- STMicroelectronics
- Texas Instruments
- Broadcom
- Qorvo
- TDK
- Infineon Technologies
- Analog Devices
- NXP Semiconductors
- Murata Manufacturing
Wide range on offer at electronica 2026
electronica brings together MEMS suppliers, component manufacturers, semiconductor companies, system providers, research institutions, and end users. Visitors can compare MEMS systems, evaluate sensor and actuator technologies, and discuss specific requirements with potential technology partners.
Developers, project managers, and decision-makers benefit from the trade fair’s market transparency: They can evaluate suppliers based on criteria such as sensor type, measurement accuracy, form factor, interfaces, power consumption, packaging, qualification, availability, and integration effort. In this way, electronica supports both technical planning and informed decisions regarding the selection of suitable components, technologies, and development partners.
At electronica, visitors can:
- Compare MEMS providers and components
- Evaluate sensor, actuator, and microsystem technologies
- Discuss requirements for integration, packaging, and reliability
- Assess trends in micro- and nanosystems
- Identify partners for development, production, and system integration
Visitors can also learn about current trends in sensors, semiconductor technology, and micro- and nanosystems through expert forums, industry events, and networking formats. The relevant formats are:
Summary
MEMS and micro-/nanosystems are key drivers of innovation in electronics. They combine sensor technology, actuator technology, and semiconductor technology in a very small space, enabling compact, energy-efficient, and networked systems. electronica provides the ideal platform for experiencing technologies, suppliers, and trends all in one place and making informed decisions about new electronics projects.
Use electronica to compare MEMS technologies and suppliers in a targeted manner, discuss technical requirements with experts, and identify suitable partners for sensor technology, actuator technology, system integration, packaging, and development.
- Get ticket now
- Discover MEMS exhibitors
- Become an exhibitor
- Subscribe to newsletter
- Follow electronica on LinkedIn
FAQ
What are MEMS?
MEMS are microelectromechanical systems that combine mechanical microstructures, sensors, actuators, and electronics.
How do MEMS work?
MEMS convert physical quantities such as pressure, acceleration, and sound into electrical signals. The signals are processed electronically and used within the system.
Where are MEMS used?
Typical applications include vehicles, smartphones, wearables, industrial applications, the Internet of Things (IoT), medical technology, microfluidics, and audio applications.
What advantages do MEMS offer over other technologies?
MEMS are small, lightweight, energy-efficient, easy to integrate, and can be produced cost-effectively in large quantities.
How do you choose the right MEMS sensor?
Key criteria include measurement range, resolution, accuracy, temperature response, long-term stability, noise, power consumption, interfaces, design, cost, availability, and certifications.
Why should I attend electronica to learn about MEMS?
The trade fair brings together MEMS technologies, suppliers, research, applications, and trends in the context of complete electronic systems.
You might also be interested in
Exhibitor directory