Due to the need for further miniaturization like the line width in PCB’s, physical vacuum deposition (PVD) is experiencing a constant expansion of application areas. The property is applied that the use of nanometer-thin layers defines mechanical, chemical, optical, and electrical surface properties. There are several influencing factors for the specific application to define the right technical solution. The lecture goes into the most important ones, starting with the selection of the specific technology, the right pre-treatment, the process control, and the handling of the substrate. The topics of process monitoring, process stability, data acquisition and interfaces are also dealt with.